Learning Module: Photolithography Overview for MEMS

By Southwest Center for Microsystems Education (SCME)

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

Published on

Abstract

This learning module provides an overview of the most common photolithography process used for the fabrication of microelectromechanical systems (MEMS), its terminology and basic concepts.  Activities allow you to further explore some of these concepts.

This learning module contains the following.

  • Pre-test (Knowledge Probe)
  • Reading:  Photolithography Overview
  • Presentation: Photolithography Overview
  • Activity:  Photolithography Terminology
  • Activity: Photoresist Thickness
  • Assessment

Instructor materials for this learning module are available here.

Sponsored by

This work made possible by Southwest Center for Microsystems Education (SCME), a National Science Foundation (NSF) funded Center through DUE grants #0830384, 0902411, and 1205138. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the NSF. 

Cite this work

Researchers should cite this work as follows:

  • Southwest Center for Microsystems Education (SCME) (2017), "Learning Module: Photolithography Overview for MEMS," http://nanohub.org/resources/26380.

    BibTex | EndNote

Submitter

MJ Willis

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

Tags