Learning Module: History of MEMS

By Southwest Center for Microsystems Education (SCME)

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

Published on

Abstract

This learning module provides a timeline of the progression of microtechnology through a series of innovations that starts with the first Point Contact Transistor built in 1947 and ends with the optical network switch in 1999.  Activities provide the opportunity to build on this timeline and to identify innovations of the 21st century that have contributed to current advancements in both micro and nanotechnology.

This learning module contains the following.

  • Pre-test:  Knowledge Probe
  • Reading:  History of MEMS
  • Presentation:  History of MEMS
  • Activity:  History of MEMS
  • Activity:  New Innovations in MEMS
  • Assessment

Instructor materials for this learning module are available here.

 

Sponsored by

This work made possible by Southwest Center for Microsystems Education (SCME), a National Science Foundation (NSF) funded Center through DUE grants #0830384, 0902411, and 1205138. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the NSF. 

Cite this work

Researchers should cite this work as follows:

  • Southwest Center for Microsystems Education (SCME) (2017), "Learning Module: History of MEMS," http://nanohub.org/resources/26533.

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Submitter

MJ Willis

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

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