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TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices. The types of processing steps modeled by the current version of the program include ion implantation, inert ambient drive-in, silicon and polysilicon oxidation and silicidation, epitaxial growth, and low temperature deposition and etching of various materials.
Because of the way this software is licensed, it is available only to users on the West Lafayette campus of Purdue University. Note that you must use a network connection on campus, or else you will get an "access denied" message.
TSUPREM-4 licensed from Synopsys, Inc.
User interface for launching simulations and analyzing results created by Steve Clark.
Researchers should cite this work as follows: