Support

Support Options

Submit a Support Ticket

 

This section is unavailable in an archive version of a tool. Consult the latest published version 1.3 for most current information.

TSuprem4

Computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices

Launch Tool

This tool version is unpublished and cannot be run. If you would like to have this version staged, you can put a request through HUB Support.

Archive Version 1.0
Published on 20 Apr 2007, unpublished on 16 Jan 2008
Latest version: 1.3. All versions

doi:10.4231/D31J9771W cite this

This tool is closed source.

Category

Tools

Published on

Abstract

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices. The types of processing steps modeled by the current version of the program include ion implantation, inert ambient drive-in, silicon and polysilicon oxidation and silicidation, epitaxial growth, and low temperature deposition and etching of various materials.

Because of the way this software is licensed, it is available only to users on the West Lafayette campus of Purdue University. Note that you must use a network connection on campus, or else you will get an "access denied" message.

Tags

nanoHUB.org, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.