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tsuprem4

By Steven Clark

Purdue University

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.

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Archive Version 1.2
Published on 15 Jul 2008, unpublished on 27 Jul 2009
Latest version: 1.3. All versions

doi:10.4231/D32B8VB40 cite this

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Abstract

TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices. The types of processing steps modeled by the current version of the program include ion implantation, inert ambient drive-in, silicon and polysilicon oxidation and silicidation, epitaxial growth, and low temperature deposition and etching of various materials.

Because of the way this software is licensed, it is available only to users on the West Lafayette campus of Purdue University. Note that you must use a network connection on campus, or else you will get an "access denied" message.

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