Learning Module: MEMS Micromachining Overview

By Southwest Center for Microsystems Education (SCME)

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

Published on

Abstract

This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems).  Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.

This learning module includes the following:

  • Pre-test (Knowledge Probe)
  • Reading:  MEMS Micromachining Overview
  • Presentation:  MEMS Micromachining Overview (pdf)
  • Activity:  Terminology and Concepts
  • Activity:  Research
  • Assessment

Instructor materials for this learning module are available here.

Sponsored by

This work made possible by Southwest Center for Microsystems Education (SCME), a National Science Foundation (NSF) funded Center through DUE grants #0830384, 0902411, and 1205138. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the NSF.

Cite this work

Researchers should cite this work as follows:

  • Southwest Center for Microsystems Education (SCME) (2017), "Learning Module: MEMS Micromachining Overview," http://nanohub.org/resources/26733.

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Submitter

MJ Willis

Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM

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