This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.
This learning module includes the following:
- Pre-test (Knowledge Probe)
- Reading: MEMS Micromachining Overview
- Presentation: MEMS Micromachining Overview (pdf)
- Activity: Terminology and Concepts
- Activity: Research
Instructor materials for this learning module are available here.
This work made possible by Southwest Center for Microsystems Education (SCME), a National Science Foundation (NSF) funded Center through DUE grants #0830384, 0902411, and 1205138. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the NSF.
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