This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.
This learning module includes the following:
- Pre-test (Knowledge Probe)
- Reading: MEMS Micromachining Overview
- Presentation: MEMS Micromachining Overview (pdf)
- Activity: Terminology and Concepts
- Activity: Research
Instructor materials for this learning module are available here.
This work made possible by Southwest Center for Microsystems Education (SCME), a National Science Foundation (NSF) funded Center through DUE grants #0830384, 0902411, and 1205138. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the NSF.
Cite this work
Researchers should cite this work as follows:
Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM