Learning Module: MEMS Micromachining Overview - Instructor Guides
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Abstract
This learning module provides an overview of three micromachining processes (bulk, surface, LIGA) used for the fabrication of microsystems or MEMS (MicroElectroMechanical Systems). Activities are provided that contribution to a better understanding of these processes and that encourage further exploration.
This learning module includes the following:
- Learning Module Map (Guide for instructor)
- Pre-test (Knowledge Probe)
- Reading: MEMS Micromachining Overview
- Presentation: MEMS Micromachining Overview
- Activity: Terminology and Concepts
- Activity: Research
- Assessment
Instructors: Please create a nanoHUB account and then request SCME Group membership in order to obtain Instructor Guides and editable slides for your personal classroom use.
Student materials for this learning module are available here.
Submitter
Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM