This learning module introduces the MEMS micropump, how it works and where it is used in microtechnology. Activities allow for further discovery into the operation of micropumps.
MEMS = MicroElectroMechanical Systems
This learning module includes the following.
- Pre-test (Knowledge Probe)
- Reading: Micropumps Overview
- Activity: The Diaphragm Pump
- Activity: Capillary Action
Instructor materials for this learning module are available here.
This work made possible by Southwest Center for Microsystems Education (SCME), a National Science Foundation (NSF) funded Center through DUE grants #0830384, 0902411, and 1205138. Any opinions, findings and conclusions or recommendations expressed in this material are those of the authors and creators, and do not necessarily reflect the views of the NSF.
Cite this work
Researchers should cite this work as follows:
Southwest Center for Microsystems Education, University of New Mexico, Albuquerque, NM