Learning Microsystems Through Problem Solving Activity - Instructor Guide

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This activity provides the opportunity for participants to demonstrate their knowledge of microsystems or MEMS (MicroElectroMechanical Systems), MEMS components, applications and operations.  Participants work in small groups to design and construct a model of a MEMS device.

This activity is recommended as a capstone activity after having studied microsystems, their applications, operation, and fabrication.

This activity includes the following.

  • Activity:  Learning Microsystems Through Problem Solving
  • Activity Checklist for identifying steps and progress
  • Presentation: MEMS Applications Overview (pptx)
  • Presentation: MEMS Components (pptx)
  • Presentation:  Linkage Assembly Fabrication (pptx)
  • Activity Guide - Applications:  Pictorial guide of MEMS Applications
  • Activity Guide - Components:  Pictorial guide of MEMS Components
  • Activity Guide - Process:  Pictorial guide of MEMS Process steps

Instructors: Please create a nanoHUB account and then request SCME Group membership in order to obtain Instructor Guides and editable slides for your personal classroom use.

Student materials for this learning module are available here.