Selective Silicon Epitaxy Seen at the Nanometer Scale
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The presenter introduces NEMS (nanoelectromechanical systems) and STM (Scanning Tunneling Microscopy and continues to present material on Selective Silicon Epitaxy seen at the Nanometer Scale
Beckman Institute for Advanced Science and Technology
University of Illinois at Urbana-Champaign
Nanohour Seminar Series
Researchers should cite this work as follows:
Matthew Mark Sztelle (2007), "Selective Silicon Epitaxy Seen at the Nanometer Scale," https://nanohub.org/resources/2810.