Dielectrics by Growth and Deposition

By NACK Network

Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

Published on

Abstract

Outline:

  • Introduction - Silicon Dioxide
  • Types of Oxide
  • Furnace Deposition
    • Dry Oxidation
    • Wet Oxidation
  • High Pressure Oxidation
  • Chemical Vapor Deposition
  • Modifying Dielectric Constant

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • NACK Network (2018), "Dielectrics by Growth and Deposition," http://nanohub.org/resources/28288.

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