Dielectrics by Growth and Deposition

By NACK Network

Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

Published on

Abstract

Outline:

  • Introduction - Silicon Dioxide
  • Types of Oxide
  • Furnace Deposition
    • Dry Oxidation
    • Wet Oxidation
  • High Pressure Oxidation
  • Chemical Vapor Deposition
  • Modifying Dielectric Constant

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • NACK Network (2018), "Dielectrics by Growth and Deposition," http://nanohub.org/resources/28288.

    BibTex | EndNote

Tags

Dielectrics by Growth and Deposition
  • Dielectrics by Growth and Deposition 1. Dielectrics by Growth and Depo… 0
    00:00/00:00
  • Outline 2. Outline 14.481147814481149
    00:00/00:00
  • Oxidation 3. Oxidation 17.517517517517518
    00:00/00:00
  • Silicon Dioxide 4. Silicon Dioxide 42.742742742742742
    00:00/00:00
  • Silicon Dioxide 5. Silicon Dioxide 58.258258258258259
    00:00/00:00
  • Oxide Quality 6. Oxide Quality 115.51551551551552
    00:00/00:00
  • Film Thickness 7. Film Thickness 138.50517183850516
    00:00/00:00
  • Silicon Dioxide Thickness 8. Silicon Dioxide Thickness 152.28561895228563
    00:00/00:00
  • Mechanism 9. Mechanism 208.50850850850853
    00:00/00:00
  • Diffusion of Oxygen 10. Diffusion of Oxygen 296.363029696363
    00:00/00:00
  • Mechanism 11. Mechanism 341.40807474140809
    00:00/00:00
  • Outline 12. Outline 384.51785118451784
    00:00/00:00
  • Types of Oxides 13. Types of Oxides 388.88888888888891
    00:00/00:00
  • Types of Oxide 14. Types of Oxide 443.74374374374378
    00:00/00:00
  • Types of Oxide 15. Types of Oxide 455.05505505505505
    00:00/00:00
  • Types of Oxide 16. Types of Oxide 508.80880880880881
    00:00/00:00
  • Types of Oxide 17. Types of Oxide 515.58224891558223
    00:00/00:00
  • Types of Oxide 18. Types of Oxide 559.693026359693
    00:00/00:00
  • Types of Oxide 19. Types of Oxide 568.66866866866872
    00:00/00:00
  • Types of Oxide 20. Types of Oxide 614.98164831498173
    00:00/00:00
  • Outline 21. Outline 619.58625291958629
    00:00/00:00
  • Oxidation 22. Oxidation 627.06039372706039
    00:00/00:00
  • Furnace Oxidation 23. Furnace Oxidation 669.76976976976982
    00:00/00:00
  • Dry Oxidation 24. Dry Oxidation 675.30864197530866
    00:00/00:00
  • Dry Oxidation 25. Dry Oxidation 684.41775108441777
    00:00/00:00
  • Dry Ox. Process Recipe 26. Dry Ox. Process Recipe 739.3393393393394
    00:00/00:00
  • Ramping 27. Ramping 801.634968301635
    00:00/00:00
  • Dry Ox. Growth Rate 28. Dry Ox. Growth Rate 810.81081081081084
    00:00/00:00
  • Wet Oxidation 29. Wet Oxidation 852.585919252586
    00:00/00:00
  • Chlorinated Agents 30. Chlorinated Agents 874.04070737404072
    00:00/00:00
  • Wet Ox. Growth Rate 31. Wet Ox. Growth Rate 913.07974641307976
    00:00/00:00
  • Wet Vs. Dry Oxidation 32. Wet Vs. Dry Oxidation 929.82982982982992
    00:00/00:00
  • Wet Vs. Dry Oxidation 33. Wet Vs. Dry Oxidation 949.14914914914914
    00:00/00:00
  • Wet Vs. Dry Oxidation 34. Wet Vs. Dry Oxidation 966.16616616616625
    00:00/00:00
  • Wet and Dry Oxide Growth 35. Wet and Dry Oxide Growth 984.11745078411752
    00:00/00:00
  • Increasing Temp. – Decreasing Time 36. Increasing Temp. – Decreasin… 1008.4417751084418
    00:00/00:00
  • Outline 37. Outline 1060.8608608608608
    00:00/00:00
  • High Pressure Oxidation - HiPOx 38. High Pressure Oxidation - HiPO… 1075.5088421755088
    00:00/00:00
  • HiPOx System 39. HiPOx System 1091.5248581915248
    00:00/00:00
  • HiPOx 40. HiPOx 1129.0290290290291
    00:00/00:00
  • HiPOx Relationships 41. HiPOx Relationships 1158.9589589589591
    00:00/00:00
  • HiPOx Relationships 42. HiPOx Relationships 1167.867867867868
    00:00/00:00
  • HiPOx Relationships 43. HiPOx Relationships 1176.9102435769103
    00:00/00:00
  • Outline 44. Outline 1190.9242575909243
    00:00/00:00
  • CVD 45. CVD 1196.4964964964966
    00:00/00:00
  • CVD 46. CVD 1212.0787454120789
    00:00/00:00
  • CVD 47. CVD 1318.2849516182851
    00:00/00:00
  • Outline 48. Outline 1337.7377377377377
    00:00/00:00
  • Engineering Dielectric Constant (k) 49. Engineering Dielectric Constan… 1352.1855188521856
    00:00/00:00
  • Engineering Dielectric Constant (k) 50. Engineering Dielectric Constan… 1407.6743410076745
    00:00/00:00
  • Engineering Dielectric Constant (k) 51. Engineering Dielectric Constan… 1417.6176176176177
    00:00/00:00
  • Low k Dielectric Materials 52. Low k Dielectric Materials 1432.832832832833
    00:00/00:00
  • Engineering Dielectric Constant (k) 53. Engineering Dielectric Constan… 1462.2288955622289
    00:00/00:00
  • Engineering Dielectric Constant (k) 54. Engineering Dielectric Constan… 1496.0960960960961
    00:00/00:00
  • High k Dielectric Materials 55. High k Dielectric Materials 1532.5658992325659
    00:00/00:00