Plasma Removal Process

By Terry Kuzma1, NACK Network1

1. Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

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  • Part 1: Can be viewed here
    • Introduction
    • Models to understand the plasma process
  • Part 2: This lecture
    • Chemistry
    • Analyzing recipe parameters, and the resultant etch profiles
    • Endpoint

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • Terry Kuzma, NACK Network (2018), "Plasma Removal Process,"

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