Physical and Chemical Vapor Deposition

By Sebastien Maeder1, NACK Network2

1. Pennsylvania State University, State College, PA 2. Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

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  • Plasma Deposition Introduction
  • Deposition Coverage
  • The Six Basic Steps of Chemical Vapor Deposition
  • Film Growth
  • Issues Concerning PECVD Deposition
  • Types of PECVD Deposition

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • Sebastien Maeder, NACK Network (2018), "Physical and Chemical Vapor Deposition,"

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