Physical and Chemical Vapor Deposition

By Sebastien Maeder1, NACK Network2

1. Pennsylvania State University, State College, PA 2. Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

Published on

Abstract

Outline

  • Plasma Deposition Introduction
  • Deposition Coverage
  • The Six Basic Steps of Chemical Vapor Deposition
  • Film Growth
  • Issues Concerning PECVD Deposition
  • Types of PECVD Deposition

Sponsored by

The Nanotechnology Applications and Career Knowledge (NACK) Network

Funded, in part, by a grant from the National Science Foundation. DUE 1205105

Cite this work

Researchers should cite this work as follows:

  • Sebastien Maeder; NACK Network (2018), "Physical and Chemical Vapor Deposition," http://nanohub.org/resources/28432.

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