Physical and Chemical Vapor Deposition

By NACK Network

Center for Nanotechnology Education and Utilization, Pennsylvania State University, State College, PA

Published on

Abstract

Outline

  • Plasma Deposition Introduction
  • Deposition Coverage
  • The Six Basic Steps of Chemical Vapor Deposition
  • Film Growth
  • Issues Concerning PECVD Deposition
  • Types of PECVD Deposition

Cite this work

Researchers should cite this work as follows:

  • NACK Network (2018), "Physical and Chemical Vapor Deposition," http://nanohub.org/resources/28432.

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