Quantum Design L2.3: Nanolithography (Nanofrazor, Newmicra, and MicroWriter ML3)
Category
Published on
Abstract
Nanolithography with:
- Nanofrazor: thermal Scanning Probe Microscopy
- Direct write laser lithography: ML3 series
- Software and Hardware add ons for EBL: NeoMicra
Sponsored by
Cite this work
Researchers should cite this work as follows:
Time
Location
Room 1001, Birck Nanotechnology Center, Purdue University, West Lafayette, IN