nanoMFG Node: Workshop on Data Science Enabled Advanced in Nanomanufacturing (DSEAN) - Feb 2019

By Elif Ertekin1, Kimani Toussaint1, Elif Ertekin1, Chenhui Shao1, Placid M. Ferreira1, Narayan Aluru1

1. University of Illinois at Urbana-Champaign, Urbana, IL



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The first 1st NSF nanomanufacturing (nanoMFG) node workshop on data-science enabled advances in nanomanufacturing took place at the University of Illinois at Urbana-Champaign on February 26-27, 2019.  Workshop participants explored the potential opportunities for an emerging area at the intersection of data science and nanomanufacturing by bringing together experts in nanomanufacturing, data science, and cyberinfrastructure.

The workshop centered on the opportunities to leverage the following 3 themes in nanomanufacturing:

       (1) Data opportunities and challenges in nanomanufacturing processes, characterization, and metrology

       (2) Data infrastructure: real-time collection, storage, and sharing

       (3) Data-enabled modeling, large-scale computing, and machine intelligence

Topics that were discussed include the following:

  • Data infrastructure for nanomanufacturing
  • Unique aspects of data-driven nanomanufacturing [real-time, large combinatorial domain, multiprocess integration, large span of potential applications (multi time and spatial scales)]
  • Using nanomanufacturing process data to improve the process
  • Leverage data to increase productivity and yield
  • Using machine intelligence to tackle process optimization
  • Structuring, formatting and archiving process data 
  • Tension between data ownership and sharing
  • Data-enabled modeling and large-scale computing of nanomanufacturing processes
  • Storing nanomanufacturing, metrology and characterization data

An outcome of this workshop will be a forthcoming position paper on data-driven nanomanufacturing.

Workshop Information:

      Location: University of Illinois at Urbana-Champaign

      Date: February 26-27, 2019

      Organizing Committee: Kimani C. Toussaint (Co-Chair), Sameh Tawfick (Co-Chair), Chenhui Shao (Co-Chair), Narayana Aluru, Placid Ferreira, Elif Ertekin, and Klara Nahrstedt

Sponsored by

NSF nanoMFG Node

Cite this work

Researchers should cite this work as follows:

  • Elif Ertekin, Kimani Toussaint, Elif Ertekin, Chenhui Shao, Placid M. Ferreira, Narayan Aluru (2019), "nanoMFG Node: Workshop on Data Science Enabled Advanced in Nanomanufacturing (DSEAN) - Feb 2019,"

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University of Illinois at Urbana-Champaign


Nanoscale Manufacturing at The University of Illinois

Nanoscale Manufacturing at The University of Illinois group image

In This Workshop

  1. Introduction to the NSF Nanomanufacturing Node

    20 Mar 2019 | Online Presentations | Contributor(s): Kimani C Toussaint