This graduate level course surveys sub-micrometer pattern-transfer techniques with applications in semiconductor manufacturing, data storage, photonics, and surface engineering. Lectures introduce the optical and mechanical principles underlying a spectrum of candidate lithography techniques, and show extensive examples of industrial applications.
Hayden Taylor is an Assistant Professor in the Department of Mechanical Engineering at the University of California, Berkeley. He was previously an Assistant Professor at Nanyang Technological University in Singapore, a Postdoctoral Research Fellow in the Biosystems and Micromechanics group at the Singapore-MIT Alliance for Research and Technology, and a Research Associate in the Microsystems Technology Laboratories at MIT.
Hayden was born in Bristol, United Kingdom, in 1981. He attended Bristol Grammar School and Trinity College, Cambridge, receiving the B.A. and M.Eng. degrees in Electrical and Electronic Engineering in 2004. He was sponsored as an undergraduate by ST Microelectronics. He is a Senior Scholar of Trinity College, Cambridge, and received the Cambridge University Engineering Department's Baker Prize in 2004. Hayden received the Ph.D. in Electrical Engineering and Computer Science from MIT in 2009, working with Professor Duane Boning.
Hayden is a member of the IEEE, the Institution of Engineering and Technology, and the Institute of Physics. He was an Institution of Electrical Engineers Jubilee Scholar 2000-4, and was a Kennedy Scholar for the academic year 2004-5.
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Nanoscale Manufacturing at The University of Illinois
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