ME 290R Lecture 1: Introduction

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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An overview of current and emerging lithography technologies and challenges. Future lithography requirements (with reference to the International Technology Roadmap for Semiconductors). Requirements for integration of lithography with other process steps.

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Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 1: Introduction,"

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