ME 290R Lecture 3.1: Nanoimprint Lithography - Process Mechanics I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 3.1: Nanoimprint Lithography - Process Mechanics I," http://nanohub.org/resources/30264.

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