ME 290R Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II

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  • (2019), "ME 290R Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II," http://nanohub.org/resources/30306.

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ME 290R Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II
  • Lecture 4.2: Nanoimprint Lithography – Imprintable Materials II 1. Lecture 4.2: Nanoimprint Litho… 0
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  • shear thinning 2. shear thinning 7.4407741074407747
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  • Shear thinning 3. Shear thinning 114.18084751418085
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  • Apparent shear-thinning in 58 kDa polystyrene 4. Apparent shear-thinning in 58 … 211.34467801134468
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  • Modeling shear thinning with strain rate 5. Modeling shear thinning with s… 248.24824824824825
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  • Shear thinning modeling: in-plane shear stresses 6. Shear thinning modeling: in-pl… 424.82482482482482
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  • Some UV-curable acrylate materials 7. Some UV-curable acrylate mater… 765.83249916583247
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  • An example of a UV-curable resist: AMONIL 8. An example of a UV-curable res… 863.39673006339672
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  • UV curing resists: typical viscosities and surface tensions 9. UV curing resists: typical vis… 964.26426426426428
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  • Thermally and UV curing resists 10. Thermally and UV curing resist… 999.49949949949951
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  • Diffraction in NIL stamps 11. Diffraction in NIL stamps 1149.7831164497832
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  • What about molecular size effects? 12. What about molecular size effe… 1152.7527527527527
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  • What about molecular size effects? 13. What about molecular size effe… 1259.7931264597933
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  • Molding a carbon nanotube into polyurethane prepolymer 14. Molding a carbon nanotube into… 1444.678011344678
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  • Overcoming oxygen inhibition 15. Overcoming oxygen inhibition 1577.6443109776444
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  • Oxygen inhibition in step-and-repeat UV-NIL 16. Oxygen inhibition in step-and-… 1670.6373039706373
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  • Approaches to demolding 17. Approaches to demolding 1853.0196863530198
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  • Etch resistance and selectivity 18. Etch resistance and selectivit… 2473.8738738738739
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  • Selectivity: example 19. Selectivity: example 2524.9249249249251
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  • Direct Etch or Direct Imprint 20. Direct Etch or Direct Imprint 2645.5455455455458
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  • In-situ Multi-step Etch Scheme 21. In-situ Multi-step Etch Scheme 2791.0243576910243
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  • How to enhance etch resistance? 22. How to enhance etch resistance… 2904.6713380046713
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