ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

Published on

Cite this work

Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I," http://nanohub.org/resources/30336.

    BibTex | EndNote

Time

Tags

ME 290R Lecture 6.1: Nanoimprint Lithography - Machine Design I
  • Lecture 6.1: Nanoimprint Lithography – Machine Design I 1. Lecture 6.1: Nanoimprint Lith… 0
    00:00/00:00
  • Machine design considerations 2. Machine design considerations 16.016016016016017
    00:00/00:00
  • Alignment, registration and overlay 3. Alignment, registration and ov… 184.91825158491827
    00:00/00:00
  • Moire-based alignment 4. Moire-based alignment 185.8858858858859
    00:00/00:00
  • Early Moire work - 2006 5. Early Moire work - 2006 188.85552218885553
    00:00/00:00
  • Scatterometry for precise alignment 6. Scatterometry for precise alig… 239.07240573907242
    00:00/00:00
  • Local heating of stamp to correct overlay errors 7. Local heating of stamp to corr… 403.50350350350351
    00:00/00:00
  • Local heating of stamp to correct overlay errors 8. Local heating of stamp to corr… 458.45845845845849
    00:00/00:00
  • Local heating of stamp to correct overlay errors 9. Local heating of stamp to corr… 585.95261928595266
    00:00/00:00
  • Load application options 10. Load application options 586.78678678678682
    00:00/00:00
  • Shear thinning 11. Shear thinning 677.71104437771112
    00:00/00:00
  • Oscillatory load application 12. Oscillatory load application 720.32032032032032
    00:00/00:00
  • Oscillatory load application 13. Oscillatory load application 796.52986319652985
    00:00/00:00
  • Ultrasonic loading of stamp 14. Ultrasonic loading of stamp 925.89255922589257
    00:00/00:00
  • Shear-assisted imprint 15. Shear-assisted imprint 1014.5812479145812
    00:00/00:00
  • Addressing gas bubble entrapment defects 16. Addressing gas bubble entrapme… 1592.9596262929597
    00:00/00:00
  • Air bubble formation/dissolution 17. Air bubble formation/dissoluti… 1922.7227227227229
    00:00/00:00
  • Air bubble formation/dissolution 18. Air bubble formation/dissoluti… 2017.1504838171506
    00:00/00:00
  • State of the art today 19. State of the art today 2144.477811144478
    00:00/00:00
  • Relative importance of gas dissolution and droplet squeezing 20. Relative importance of gas dis… 2311.344678011345
    00:00/00:00