ME 290R Lecture 6.2: Nanoimprint Lithography – Machine Design II

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

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Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 6.2: Nanoimprint Lithography – Machine Design II," http://nanohub.org/resources/30337.

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ME 290R Lecture 6.2: Nanoimprint Lithography – Machine Design II
  • Lecture 6.2: Nanoimprint Lithography – Machine Design II 1. Lecture 6.2: Nanoimprint Lit… 0
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  • Dependence of gas entrapment 2. Dependence of gas entrapment 12.145478812145479
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  • Dependence of gas entrapment 3. Dependence of gas entrapment 432.06539873206543
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  • Dependence of gas entrapment 4. Dependence of gas entrapment 436.50316983650316
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  • Dependence of gas entrapment 5. Dependence of gas entrapment 467.13380046713382
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  • Alternative to noble gas 6. Alternative to noble gas 536.83683683683682
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  • Real-time monitoring of cavity filling by dark-field microscopy 7. Real-time monitoring of cavity… 637.53753753753756
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  • Real-time monitoring of cavity filling by dark-field microscopy 8. Real-time monitoring of cavity… 884.41775108441777
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  • Roller imprint considerations 9. Roller imprint considerations 935.03503503503509
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  • For roller NIL simulation 10. For roller NIL simulation 1015.3820487153821
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  • Directional squeezing of material 11. Directional squeezing of mater… 1674.7414080747415
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  • Simulations reproduce residual layer thickness dependencies 12. Simulations reproduce residual… 2071.8718718718719
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  • For a thermoplastic web 13. For a thermoplastic web 2319.5195195195197
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  • When imprinting viscoelastic materials 14. When imprinting viscoelastic m… 2730.3303303303305
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  • When imprinting viscoelastic materials 15. When imprinting viscoelastic m… 2920.0533867200534
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  • A roller-substrate elasticity mismatch 16. A roller-substrate elasticity … 3268.2349015682348
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