ME 290R Lecture 12.1: Scanning-beam Lithography and Directed Self-assembly I

By Taylor, Hayden

Mechanical Engineering, University of California at Berkeley, Berkeley, CA

Published on

Cite this work

Researchers should cite this work as follows:

  • Taylor, Hayden (2019), "ME 290R Lecture 12.1: Scanning-beam Lithography and Directed Self-assembly I," http://nanohub.org/resources/30498.

    BibTex | EndNote

Time

Tags