Computer aided design environments are very mature and used extensively for the design of every integrated electronical component that is commercially available to all of us. This presentation reviews recent developments in taking that framework and making it pertinent to the design of systems that include MEMS and NEMS devices.
Breezed and Uploaded by Cezary Wojtkowski
University of Illinois at Urbana-Champaign.
Researchers should cite this work as follows:
(2008), "CAD of MEMS & NEMS: State of the Art & Future Challenges," http://nanohub.org/resources/4085.