CAD of MEMS & NEMS: State of the Art & Future Challenges

By Andreas Cangellaris

University of Illinois at Urbana-Champaign

Published on

Abstract

Computer aided design environments are very mature and used extensively for the design of every integrated electronical component that is commercially available to all of us. This presentation reviews recent developments in taking that framework and making it pertinent to the design of systems that include MEMS and NEMS devices.

Credits

Presentation by Andreas C. Cangellaris
Breezed and Uploaded by Cezary Wojtkowski
University of Illinois at Urbana-Champaign.

Sponsored by

DARPA
Rockwell Collins
Raytheon
BAE Systems
Rogers Corporation
ID&T
nGimat

Cite this work

Researchers should cite this work as follows:

  • Andreas Cangellaris (2008), "CAD of MEMS & NEMS: State of the Art & Future Challenges," http://nanohub.org/resources/4085.

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