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Total: updated 03 May 2013
Users: 246
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Google/IEEE: updated 22 Apr 2010
Avg. Review: 5.0 out of 5 stars
Citations: 3

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CAD of MEMS & NEMS: State of the Art & Future Challenges

By Andreas Cangellaris

University of Illinois at Urbana-Champaign

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    Anonymous

    5.0 out of 5 stars

    A really nice overview of the MEMS field for those who know little more that what the letters stand for. Also presents some interesting thoughts about nanotechnology and MEMS.

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