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CAD of MEMS & NEMS: State of the Art & Future Challenges

By Andreas Cangellaris

University of Illinois at Urbana-Champaign

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Computer aided design environments are very mature and used extensively for the design of every integrated electronical component that is commercially available to all of us. This presentation reviews recent developments in taking that framework and making it pertinent to the design of systems that include MEMS and NEMS devices.


Presentation by Andreas C. Cangellaris
Breezed and Uploaded by Cezary Wojtkowski
University of Illinois at Urbana-Champaign.

Sponsored by

Rockwell Collins
BAE Systems
Rogers Corporation

Cite this work

Researchers should cite this work as follows:

  • Andreas Cangellaris (2008), "CAD of MEMS & NEMS: State of the Art & Future Challenges,"

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Tags, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.