This exercise demonstrates to the students how the low-frequency CV curves in MOS capacitors change with changing the gate workfunction, the oxide thickness and the dielectric constant. It also demonstrates the doping variation of the high-frequency CV curves.

Researchers should cite this work as follows:

• Dragica Vasileska; Gerhard Klimeck (2008), "Exercise: CV curves for MOS capacitors," https://nanohub.org/resources/4855.

1. ABACUS
2. ACUTE
3. CV curves
4. MOS capacitors
5. nanoelectronics