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ECE 612 Lecture 18A: CMOS Process Steps

By Mark Lundstrom

Purdue University

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Licensed under Creative Commons according to this deed.

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Abstract Outline: 1) Unit Process Operations, 2) Process Variations.
Cite this work

Researchers should cite this work as follows:

  • Mark Lundstrom (2008), "ECE 612 Lecture 18A: CMOS Process Steps," http://nanohub.org/resources/5788.

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Time 10:30 AM, November 04, 2008
Location EE 117, Purdue University, West Lafayette, IN
Tags
  1. CMOS
  2. course lecture
  3. MOSFET
  4. nanoelectronics
  5. nanostransistors
  6. processing
  7. transistors

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