Micro‐system technology has been developed over a number of years, with the first coherent vision for this technology being eloquently stated by Dr. Richard Feynman nearly fifty years ago. Twenty years after Dr. Feynman’s talk, micro‐systems remained largely a laboratory curiosity with the bulk of the research being performed to develop fabrication processes and integration techniques to produce useful devices.
Recent years have seen an explosion of products which have been developed to enhance our daily lives in such diverse areas as automotive, health care, communications, and displays. Micro‐system applications encompass a broad spectrum of physics, such as optics, fluidics, radio‐frequency devices, etc. This spectrum of applications and smaller size scale make new and coupled physical phenomena available to the engineer to exploit. This has necessitated the development multi‐physics analysis tools and measurement techniques to provide design information for these devices.
This talk will discuss the historical development of micro‐system technology, the products that have been developed and the challenges to development of a reliable product. The newly formed PRISM center at Purdue is uniquely poised to address these issues and impact future development of micro‐System technology.
Cite this work
Researchers should cite this work as follows:
Birck Nanotechnology Building, Room 1001
- research seminar
- nano electro-mechanical systems