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Illinois ME 498 Introduction of Nano Science and Technology, Lecture 18: Enabling tools for Characterization of Nanoscale Materials

By Nick Fang1, Omar N Sobh2

1. Massachusetts Institute of Technology (MIT) 2. University of Illinois at Urbana-Champaign

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Enabling tools for nanoscale materials


  • Vapor - Liquid - Solid Nanowire Growth
  • Anodizing Alumina as Template
  • Sensing with Nanowires
  • Imagning with Energy Beams
  • Scanning electron Microscopy (SEM)
  • Electron Sources
  • Field Emission Principle
  • Limitations of the Beam Size
  • Liquid Metal Ion Source
  • Uniqueness of Ion Beam
  • Examples of FIB Technology
  • Ion Beam Sputter Milling

Tags, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.