Illinois ME 498 Introduction of Nano Science and Technology, Lecture 18: Enabling tools for Characterization of Nanoscale Materials
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Abstract
Enabling tools for nanoscale materials
Topics:
- Vapor - Liquid - Solid Nanowire Growth
- Anodizing Alumina as Template
- Sensing with Nanowires
- Imagning with Energy Beams
- Scanning electron Microscopy (SEM)
- Electron Sources
- Field Emission Principle
- Limitations of the Beam Size
- Liquid Metal Ion Source
- Uniqueness of Ion Beam
- Examples of FIB Technology
- Ion Beam Sputter Milling
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