Illinois ME 498 Introduction of Nano Science and Technology, Lecture 18: Enabling tools for Characterization of Nanoscale Materials

By Nick Fang1, Omar N Sobh2

1. Massachusetts Institute of Technology (MIT) 2. University of Illinois at Urbana-Champaign

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Abstract

Enabling tools for nanoscale materials

Topics:

  • Vapor - Liquid - Solid Nanowire Growth
  • Anodizing Alumina as Template
  • Sensing with Nanowires
  • Imagning with Energy Beams
  • Scanning electron Microscopy (SEM)
  • Electron Sources
  • Field Emission Principle
  • Limitations of the Beam Size
  • Liquid Metal Ion Source
  • Uniqueness of Ion Beam
  • Examples of FIB Technology
  • Ion Beam Sputter Milling

Cite this work

Researchers should cite this work as follows:

  • Nick Fang; Omar N Sobh (2009), "Illinois ME 498 Introduction of Nano Science and Technology, Lecture 18: Enabling tools for Characterization of Nanoscale Materials," http://nanohub.org/resources/7843.

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