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ME 597 Lecture 26: Scanning Probe Nanolithography

By Ron Reifenberger

Purdue University

Published on


  • STM – early work
  • Arranging atoms with a tip
  • Local Oxidation Lithography (Electrochemical)
  • Dip Pen Lithography
  • Nanografting


Related reading:

Cite this work

Researchers should cite this work as follows:

  • Ron Reifenberger (2009), "ME 597 Lecture 26: Scanning Probe Nanolithography,"

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Armstrong B71, Purdue University, West Lafayette

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