ME 597 Lecture 26: Scanning Probe Nanolithography
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Abstract
Topics:
- STM – early work
- Arranging atoms with a tip
- Local Oxidation Lithography (Electrochemical)
- Dip Pen Lithography
- Nanografting
References
Related reading:
- Garcia, Martinez and Martinez, Nano-chemistry and scanning probe nanolithographies, Chem. Soc. Rev. 35, 29-38 (2006)
- Rosa and Liang, Atomic force microscope nanolithography: dip-pen, nanoshaving, nanografting, tapping mode, electrochemical and thermal nanolithography, J. Phys. Condens. Matter 21, 483001 (2009)
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Armstrong B71, Purdue University, West Lafayette