Support

Support Options

Submit a Support Ticket

 

Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing

By Nick Fang1, Omar Sobh1

1. University of Illinois at Urbana-Champaign

Published on

Abstract

Nanomaterials and Devices for Solar Energy

Topics:

  • From Si crystals to Wafers
  • From Wafers to Chips
  • Photolithography: Definitions
  • Optical Lithography
  • Multi-Photon Lithography
  • E-Beam Lithography
  • Imprinting Lithography
  • Scanning probe lithography
  • Additive Processes
  • Thermal Oxidation
  • Diffusion
  • Thermal Evaporation
  • Evaporation: Shadowing
  • Planetary Evaporator
  • Subtractive Process
  • Etching
  • Etch Selectivity
  • Anisotropic Wet Etching
  • Dry Etching Profiles
  • Process Flow
  • Processing Steps in Final Packaging
  • Yield issue in processing
  • Cite this work

    Researchers should cite this work as follows:

    • Nick Fang; Omar Sobh (2010), "Illinois ME 498 Introduction of Nano Science and Technology, Lecture 26: Nanomanufacturing 1: Semiconductor Manufacturing," http://nanohub.org/resources/8132.

      BibTex | EndNote

    Tags

    No classroom usage data was found. You may need to enable JavaScript to view this data.

    nanoHUB.org, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.