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By jason clark1, Prabhakar Marepalli1, xing jin1, Aarti Chigullapalli1

1. Purdue University

MEMS design, modeling, and simulation

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Version 0.05w - published on 16 Apr 2015

doi:10.4231/D3J38KJ5S cite this

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View All Supporting Documents, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.