This talk will introduce hierarchical physical models and efficient
computational techniques for coupled analysis of electrical,
mechanical and van der Waals energy domains encountered in NEMS.
Numerical results will be presented for several silicon
nanoelectromechanical switches to understand the static
electromechanical pull-in behavior.
N. R. Aluru is currently an Associate Professor in the Department of
Mechanical & Industrial Engineering at UIUC. He is also affiliated with the
Beckman Institute for Advanced Science and Technology, the Department of
Electrical and Computer Engineering and the Bioengineering Department at UIUC.
He received the B.E. degree with honors and distinction from the Birla
Institute of Technology and Science (BITS), Pilani, India, in 1989, the M.S.
degree from Rensselaer Polytechnic Institute, Troy, NY, in 1991, and the Ph.D.
degree from Stanford University, Stanford, CA, in 1995.
He was a Postdoctoral Associate at the Massachusetts Institute of Technology
(MIT), Cambridge, from 1995 to 1997. In 1998, he joined the University of
Illinois at Urbana-Champaign (UIUC) as an Assistant Professor. He received
the NSF CAREER award and the NCSA faculty fellowship in 1999, the 2001 CMES
Distinguished Young Author Award, the Xerox Award and the Willett Faculty
Scholar Award in 2002. He is a Subject Editor for the IEEE/ASME Journal
of Microelectromechanical Systems, Associate Editor for the IEEE Transactions
on Circuits and Systems II and serves on the Editorial Board of a number of
other journals.
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