Illinois ABE 446 Lecture 4: Micromachining

By Kaustubh Bhalerao

University of Illinois at Urbana-Champaign

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Researchers should cite this work as follows:

  • Kaustubh Bhalerao (2010), "Illinois ABE 446 Lecture 4: Micromachining," http://nanohub.org/resources/8533.

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