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By Shuqing (Victor) Cao1, Yang Liu1, Peter Griffin1
1. Stanford University
This tool simulates dopant diffusion coupled with point defects.
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Version 1.0 - published on 22 Aug 2014
doi:10.4231/D3Q814T06 cite this
This tool is closed source.
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Location of all "Process Lab: Defect-coupled diffusion" Users Since Its Posting