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Home › Resources › Tools › Process Lab:Oxidation › Supporting Docs

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Process Lab:Oxidation

By Shuqing (Victor) Cao¹, Yang Liu¹, Peter Griffin¹

1. Stanford University

Integrated Circuit Fabrication Process Simulation

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Version 1.0 - published on 14 Sep 2006

doi:10.4231/D3T43J24J cite this

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(PDF, 94 Kb) Theory and Models

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