Process Lab:Oxidation

By Shuqing (Victor) Cao1, Yang Liu1, Peter Griffin1

1. Stanford University

Integrated Circuit Fabrication Process Simulation

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Version 1.01 - published on 22 Aug 2014

doi:10.4231/D3FT8DK6Z cite this

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Version Released DOI Handle Published
1.01 22 Aug 2014 doi:10.4231/D3FT8DK6Z yes
1.0 14 Sep 2006 doi:10.4231/D3T43J24J no