Support Options

Submit a Support Ticket


Process Lab:Oxidation

By Shuqing (Victor) Cao1, Yang Liu1, Peter Griffin1

1. Stanford University

Integrated Circuit Fabrication Process Simulation

Launch Tool

You must login before you can run this tool.

Version 1.0 - published on 14 Sep 2006

doi:10.4231/D3T43J24J cite this

This tool is closed source.

View All Supporting Documents


New Wish

Recent Wishes (0)

No classroom usage data was found. You may need to enable JavaScript to view this data.