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CAD for MEMS via systems of compact models. This commercial tool is published by Sugarcube Systems, which requires a registration fee to use. The nanoHUB does not receive revenue or assume liability for the use of this tool.
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Cite this work
Researchers should cite this work as follows:
- nano electro-mechanical systems
- comb drive
- compact modeling
- systems analysis
- Systems on Chip
- Compact Model
- MEMS and Microsystems