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MEMS Resonator - Tang
Parametric Tang's Comb-Drive Modeling and Simulation
Category
Published on
Abstract
The tool is currently designed to simulate Tang's comb-drive. All the inputs such as geometric size, material properties, actuation information are parameters transparent to users.
There are two different simulations can be done: static analysis and (up to two parameters) sweep analysis.
In the static analysis, the original and actuated 3D model pictures are provided. A table of all the deflection value of the center point as well as the netlist used to created the model in SUGAR are also downloaded.
In the sweep test, a family of sweeping curves is plotted and all the numerical values are offered as a text file.
Credits
This tool is based on the work of LI, Fengyuan (Thomas) and CLARK, Jason.
Cite this work
Researchers should cite this work as follows: