MEMS Resonator - Tang

By Fengyuan Li1; Jason Clark1

1. Purdue University

Parametric Tang's Comb-Drive Modeling and Simulation

Launch Tool

You must login before you can run this tool.

Version 1.1 - published on 20 Aug 2014

doi:10.4231/D3PG1HP54 cite this

This tool is closed source.

View All Supporting Documents