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MEMS Resonator - Tang

By Fengyuan Li1, Jason Clark1

1. Purdue University

Parametric Tang's Comb-Drive Modeling and Simulation

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Version 1.1 - published on 20 Aug 2014

doi:10.4231/D3PG1HP54 cite this

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Versions

Version Released DOI Handle Published
1.1 20 Aug 2014 doi:10.4231/D3PG1HP54 yes
1.0.1 20 Oct 2009 doi:10.4231/D3RR1PM3Q no
1.0 29 Jan 2009 doi:10.4231/D3VX06301 no

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