MEMS Resonator - Tang

By Fengyuan Li¹; Jason Clark¹

1. Purdue University

Parametric Tang's Comb-Drive Modeling and Simulation

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Version 1.1 - published on 20 Aug 2014

doi:10.4231/D3PG1HP54 cite this

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Versions

Version	Released	DOI Handle	Published
1.1	20 Aug 2014	doi:10.4231/D3PG1HP54	yes
1.0.1	20 Oct 2009	doi:10.4231/D3RR1PM3Q	no
1.0	29 Jan 2009	doi:10.4231/D3VX06301	no