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MEMS Resonator - Tang

By Fengyuan Li1, Jason Clark1

1. Purdue University

Parametric Tang's Comb-Drive Modeling and Simulation

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Version 1.1 - published on 20 Aug 2014

doi:10.4231/D3PG1HP54 cite this

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The tool is currently designed to simulate Tang's comb-drive. All the inputs such as geometric size, material properties, actuation information are parameters transparent to users. There are two different simulations can be done: static analysis and (up to two parameters) sweep analysis. In the static analysis, the original and actuated 3D model pictures are provided. A table of all the deflection value of the center point as well as the netlist used to created the model in SUGAR are also downloaded. In the sweep test, a family of sweeping curves is plotted and all the numerical values are offered as a text file.


This tool is based on the work of LI, Fengyuan (Thomas) and CLARK, Jason.

Cite this work

Researchers should cite this work as follows:

  • Fengyuan Li; Jason Clark (2014), "MEMS Resonator - Tang," (DOI: 10.4231/D3PG1HP54).

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Tags, a resource for nanoscience and nanotechnology, is supported by the National Science Foundation and other funding agencies. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.