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tsuprem4
TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.
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TSUPREM-4 is a computer program for simulating the processing steps used in the manufacture of silicon integrated circuits and discrete devices.
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Version 1.3 - published on 27 Jul 2009
doi:10.4231/D3MK6578X cite this
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